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C. MOLDOVAN, O. NEDELCU, P. JOHANDER, I. GOENAGA, D. GOMEZ, P. PETKOV, U.
KAUFMANN, H.-J. RITZHAUPT-KLEISSL, R. DOREY, K. PERSSON
Ceramic Micro Heater Technology for Gas Sensors
Abstract.
The paper
presents the design and manufacturing steps of micro heaters, built on ceramic
suspended membranes for gas sensor applications. The
micro heaters are designed and fabricated by combining laser milling techniques,
and conductive ceramic technology. Trenches are created in the ceramic
substrate in order to define the geometry of the heater using
laser processing of the substrate. The heater is
completed by filling the trenches with conductive ceramic paste and then baking
to remove the solvent from the paste. The final step
involves releasing the membrane by laser milling, enabling it to be
suspended on four bridges, to minimise the dissipation of the
heat in the substrate. The temperature of the heater element was measured with a
heat camera from FLIR 40 system comparing the case of
the heater positioned on top of a released membrane
and that of the non-released membrane. The simulation of
the heater build on top of a released membrane was compared
with the heater measurements.
Keywords: Micro heaters, gas sensor.
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