Ciprian ILIESCU, Marioara AVRAM, Jianmin MIAO, Francis E.H. TAY
A New Fabrication Process for Inertial Sensors with Tunable Range
Abstract.
This paper presents a new and simple (two masks) fabrication process for
capacitive inertial sensors using comb drive structures.. A conductive silicon
wafer is anodically bonded on Pyrex glass substrate. The high aspect ratio
silicon structure was micromachined using deep RIE and released from the glass
substrate by further deep RIE process due to the notching effect of the
reflected charges on the glass. The spring stiffness was adjusted with another
DRIE process. In this way, inertial sensors with different range can be process
using same masks only by changing the spring stiffness.
Keywords: inertial sensors with adjustable range, high aspect ratio,
anodic bonding, comb drive. |