V. MOAGAR-POLADIAN, Z. RYMUZA, M. DESMULLIEZ, C. TIBEICA, N. CORDERO
Simulation of the Mechanical Contact between Rough Surfaces of Electrostatically Actuated Cantilever Beam Structures

Abstract.
This paper deals with the work including the simulation for designing a device to be used as experimental structure for the study of stiction effect. Design of test structures, modeling of rough surfaces and contact simulation were performed using FEM-based simulation tools CoventorWare and ANSYS. The roughness parameters and AFM images were used as input data for creating the 3D model of rough surface. Two different algorithms were developed for creating the rough surface models. Contact behavior as a function of roughness parameters and material properties of Ni samples was determined.