C. MOLDOVAN, R. IOSUB
Design and Technology of Silicon Microsensors for Gas Detection

Abstract.
The paper presents the main principles of detection for the gas sensors silicon based. The silicon sensors present the advantages of miniaturization, integration of the processing signal circuits on the same chip with the sensor, reproducibility, low power consumption and high sensitivity. The realisation of gas microsensors on silicon using the micromachining techniques will be presented. The usual gas sensors silicon based can be divided in: Chemoresistive, Field effect transistor and resonant sensors. The layout and the micromachining technological steps for an interdigitated integrated capacitor used for gases detection, covered with phthalocyanine (Pc) as sensitive layer, the resonant gas sensors realized by silicon micromachining (design, simulation, technology, experiments) and the CHEMFET sensors will be shortly presented.