D. NECULOIU, A. MULLER, P. PONS, L. BARY, M. SAADAOUI, C. BUICULESCU, I. PETRINI, R. PLANA, D. DASCĂLU
Millimeter Wave Front-Ends with Integrated Micromachined Yagi-Uda Antenna

Abstract.
The paper presents the design, fabrication and experiments one emitter front-end and one receiver front-end for millimeter-wave applications in the 45 GHz frequency range. The emitter integrates a 15-45 GHz frequency tripler with a membrane-supported Yagi-Uda antenna. The receiver is based on a voltage doubler detector integrated with the same type of micromachined antenna. Electromagnetic simulations and nonlinear optimization were used in the design. A new technological process was used for silicon micromachining. The experimental characterization of the membrane-supported Yagi-Uda antenna, the transmitter front-end and of the receiver front-end was presented.