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G. SAJIN, A.-M. MOISIN, F. CRACIUNOIU,
A.-I. DUMITRU
Controlled Properties Piezo-Ceramics as Support for Surface Acoustic Waves
Resonators
Abstract.
The paper presents the works carried out in order to obtain SAW devices on
ceramic substrates with controlled piezoelectric properties. As ceramics, two
different perovskite type systems were chosen: lead titanate with rare earths
substitutions and substituted lead titanate zirconate. The resonant frequency
resulting from measurements on 12 resonators is distributed in a narrow range
centered on 9 MHz. A very important limiting parameter is the roughness of the
substrate and a comparison between two ceramics with different surface polishing
degrees is made. |