ROMANIAN JOURNAL OF INFORMATION SCIENCE AND
TECHNOLOGY
Volume 3, Number 2, 2000, 129 - 142
Technologies for Emitters
and Devices Based on Field Emission
Dan Nicolaescu
Electrotechnical Laboratory,
1-1-4 Umezono, Tsukuba, Ibaraki, 305-8568, Japan
E-mail: ndan@etl.go.jp
Abstract.
The article
reviews several basic technologies used to develop emitters and devices based on field
emission. These microelectronic structures have as key element the "emitter", a
sharp protrusion with curvature radius in the nanometer range. Vertical emitters are
obtained either using vacuum deposition through a narrow hole or etching special
structures defined in the silicon substrate. Lateral emitters use patterned sandwiches of
thin films. |