V. PUYAL, D. DUBUC, K. GRENIER, C. BORDAS, O. VENDIER, J.-L. CAZAUX
Design of Robust RF-MEMS Phase Shifters in Ka-band

Abstract. Design and performance of RF-MEMS Phase Shifters in Ka-band are presented. The used Si compatible technology aims to fabricate RF-MEMS devices which are able to handle medium RF-power. Two Phase Shifter versions were designed and compared with respect to capacitance fluctuations.

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